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Semiconductor devices - Micro-electromechanical devices - Part 46: Silicon based MEMS fabrication technology - Measurement method of tensile strength of nanoscale thickness membrane

Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Semiconductor devices - Micro-electromechanical devices - Part 48: Test method for determining solution concentration by optical absorption using MEMS fluidic device

Semiconductor devices - Micro-electromechanical devices - Part 49: Temperature and humidity test methods for piezoelectric MEMS cantilevers

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS

Semiconductor devices - Micro-electromechanical devices - Part 50: MEMS capacitive microphones

Semiconductor devices - Micro-electromechanical devices - Part 52: Biaxial tensile testing method for stretchable MEMS

Semiconductor devices - Micro-electromechanical devices - Part 53: MEMS electrothermal transfer device

Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials

Semiconductor devices - Micro-electromechanical devices - Part 7: MEMS BAW filter and duplexer for radio frequency control and selection

Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films

Electricity metering equipment - General requirements, tests and test conditions - Part 11: Metering equipment

Interpretation Sheet 1 - Electricity metering equipment (AC) - General requirements, tests and test conditions - Part 31: Product safety requirements and tests

Electricity metering equipment - General requirements, tests and test conditions - Part 41: Energy registration methods and requirements for multi-energy and multi-rate meters

Electricity metering equipment - Particular requirements - Part 21: Static meters for AC active energy (classes 0,5, 1 and 2)

Electricity metering equipment - Particular requirements - Part 22: Static meters for AC active energy (classes 0,1S, 0,2S and 0,5S)

Electricity metering equipment - Particular requirements - Part 23: Static meters for reactive energy (classes 2 and 3)

Electricity metering equipment - Particular requirements - Part 24: Static meters for fundamental component reactive energy (classes 0,5S, 1S, 1, 2 and 3)

Electricity metering equipment - Particular requirements - Part 41: Static meters for DC energy (classes 0,5 and 1)